20 May 2009 Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer
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Abstract
Sinusoidal-phase modulation interferometer is a new type of optical precision measuring instrument with nanometer accuracy real-time surface profile measurement. This paper based on real-time surface profile measurement of sinusoidal-phase modulation interferometry, researched filter theory and phase-interference in real-time measurement systems, its phase error is analyzed, and it discusses the theory of error types and causes of error, error estimation and derived measurement formula. Experiment proves the correctness of theory and application of research findings in the works in a certain significance.
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Guotian He, Guotian He, Helun Jiang, Helun Jiang, Rongchang Liao, Rongchang Liao, } "Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831N (20 May 2009); doi: 10.1117/12.828674; https://doi.org/10.1117/12.828674
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