20 May 2009 Research on vibration cancellation interferometric measurements of surface profile with nanometer accuracy
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Abstract
Surface profile of the micro-nanometer-mechanical structure characterized one of the most important. This paper proposes an anti-vibration interference measurement method, develops an anti-vibration sinusoidal-phase modulation (SPM) interferometer for surface profile measurement, and elaborates on its principle. It also analyzes the subsystems of the anti-vibration feedback control principles: the feedback control subsystem signal from interference to retrieve a point of interfering signals as feedback signals into laser diode (LD) to change the wavelength, which will reduce influence on the ambient temperature changes, vibration and so on. Measuring impact can be reduced to the minimum to improve the measurement stability and accuracy. Repeatability in the measurements was about 2.3 nm. Experimental results show that the measurement method is feasible.
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Helun Jiang, Helun Jiang, Guotian He, Guotian He, } "Research on vibration cancellation interferometric measurements of surface profile with nanometer accuracy", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72831O (20 May 2009); doi: 10.1117/12.828676; https://doi.org/10.1117/12.828676
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