Iterative estimation of phase distribution on reference planes in grating projection profilometry

Xiaoling Zhang; Baofeng Zhang; Yuchi Lin; Dongmei Liu; Xiaofei Li

doi:10.1117/12.828765

20 May 2009 Iterative estimation of phase distribution on reference planes in grating projection profilometry

Xiaoling Zhang, Baofeng Zhang, Yuchi Lin, Dongmei Liu, Xiaofei Li

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 728337 (2009) https://doi.org/10.1117/12.828765
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

The unwrapped phase distribution on reference planes with different heights in grating project profilometry are analyzed and synthesized. Then a two-parameter second-order rational polynomial to express the uneven phases on every plane is proposed. A first-order Taylor series expansion is employed to obtain the polynomial coefficients of rational polynomial based on least-square iterative estimation method. By this method, phases on all the reference planes are retrieved precisely and extended to the full field. The results of experiences proved that the method not only can retrieve the phases distribution on the full field from parts reference planes, but geometrical parameter error, real reference plane profile error and random error are decreased, and coordinate measuring precision is also increased.

Citation Download Citation

Xiaoling Zhang, Baofeng Zhang, Yuchi Lin, Dongmei Liu, and Xiaofei Li "Iterative estimation of phase distribution on reference planes in grating projection profilometry", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 728337 (20 May 2009); https://doi.org/10.1117/12.828765

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