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18 May 2009 Application of MEMS blazed gratings in WDM
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For the shortage and limitation of ruled grating that have ghost lines and stray light because of period error and ruling irregularity, a method for making a wavelength division multiplexer (WDM) based on Micro Electro-Mechanical System (MEMS) blazed grating is proposed. The basic composition of WDM based on MEMS blazed grating is introduced according to the method. The process realizing MEMS blazed grating and means for improving diffraction efficiency are also introduced. MEMS blazed grating is numerical simulated and analyzed in laboratory virtual instrument engineering workbench (LabVIEW), the diffraction intensity distribution of blazed grating is presented, it is shown that the blazed grating, period is 2000nm and blazed angle is 20 degree, have the best division effect for light wave with wavelength about 1.55μm by the results. At the same time, the 3D layout of WDM is provided in ZEMAX, and the rays in WDM are traced also. It is indicated by the results when the channel spacing is greater than or equal to 50nm, the division effect is in evidence. It achieves the capability of Coarse Wavelength Division Multiplexing (CWDM). It is proved that MEMS blazed grating can be applied well in WDM by all the results.
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Yongfeng Wu, Honglin Yu, and Zhiping Kang "Application of MEMS blazed gratings in WDM", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840D (18 May 2009);

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