18 May 2009 Rim morphology of nanopore for studying single biomolecule
Author Affiliations +
Abstract
The fabrication and application of micro- and nanoscale containers and devices are recently attracted much attention. The top profiles of these nanoscale patterns are very important for nano-devices integration. The morphologies of small containers, nanopit and nanopore fabricated with focused ion beam (FIB) milling tool, are explored by atomic force microscopy (AFM). The topography of every pattern looks like a volcano. The protruded ring-shaped structures surrounding the crater are attributed to the swelling due to the amorphization when FIB processed the crystal silicon nitride (Si3N4) substrate. In addition, the morphologies of anodic alumina oxide (AAO) membranes fabricated by anodizing of metallic aluminum are discussed.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kaige Wang, Qiang Li, Guiwen Xu, Aizi Jin, Changzhi Gu, "Rim morphology of nanopore for studying single biomolecule", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840U (18 May 2009); doi: 10.1117/12.832089; https://doi.org/10.1117/12.832089
PROCEEDINGS
4 PAGES


SHARE
Back to Top