Increasing the sensitivity of Love wave sensors with thicker waveguide layer by modified spin coating method

Jia Hu; Xiosong Du; Guangzhong Xie; Ping Sun; Yadong Jiang

doi:10.1117/12.832094

18 May 2009 Increasing the sensitivity of Love wave sensors with thicker waveguide layer by modified spin coating method

Jia Hu, Xiosong Du, Guangzhong Xie, Ping Sun, Yadong Jiang

Author Affiliations +

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 72840Z (2009) https://doi.org/10.1117/12.832094
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

A modified spin coating method is utilized to prepare waveguide layers of Love Wave devices. The thickness of PMMA waveguide layer up to 3.0 μm is obtained with a smooth surface. The properties of these sensors, such as, mass sensitivity, insertion loss are studied as a function of layer thickness. Mass sensitivity up to 705cm2g-1 is demonstrated.

Citation Download Citation

Jia Hu, Xiosong Du, Guangzhong Xie, Ping Sun, and Yadong Jiang "Increasing the sensitivity of Love wave sensors with thicker waveguide layer by modified spin coating method", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840Z (18 May 2009); https://doi.org/10.1117/12.832094

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