18 May 2009 Increasing the sensitivity of Love wave sensors with thicker waveguide layer by modified spin coating method
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Abstract
A modified spin coating method is utilized to prepare waveguide layers of Love Wave devices. The thickness of PMMA waveguide layer up to 3.0 μm is obtained with a smooth surface. The properties of these sensors, such as, mass sensitivity, insertion loss are studied as a function of layer thickness. Mass sensitivity up to 705cm2g-1 is demonstrated.
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Jia Hu, Jia Hu, Xiosong Du, Xiosong Du, Guangzhong Xie, Guangzhong Xie, Ping Sun, Ping Sun, Yadong Jiang, Yadong Jiang, } "Increasing the sensitivity of Love wave sensors with thicker waveguide layer by modified spin coating method", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840Z (18 May 2009); doi: 10.1117/12.832094; https://doi.org/10.1117/12.832094
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