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18 May 2009 Fabrication and emission properties of LaB6 field emission microtriodes
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Abstract
Lanthanum hexaboride(LaB6) is a new and exciting field emitter material due to its special properties. In this paper, LaB6 field emission microtriodes have been fabricated on n-type(100) single crystal silicon substrates by Spindt method. Such cathodes are produced in closely packed arrays containing 2.7×104 cones that are about 1.0 μm tall in an area of 1mm2. The field emission characteristics are studied in a conventional triode test cell in vacuum system. The turn-on voltage of LaB6-FEAs is 60V, and the emitters draw about 5.58mA total emission at the gate voltage of 145V. Furthermore, the Fower-Nordheim plot obtained from the current-voltage characteristic is found to be nearly linear in accordance with the quantum mechanical tunneling phenomenon.
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Xiaoju Wang, Yadong Jiang, Zhulun Lin, Kangcheng Qi, and Jiankang Dong "Fabrication and emission properties of LaB6 field emission microtriodes", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728411 (18 May 2009); https://doi.org/10.1117/12.832096
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