Electrostatic control with discrete area variation for beam steering and focusing using membrane mirrors

Miles A. Wickersham; Brian C. Fehrman; Lisa K. Robinson; Andrew W. Downs; Umesh A. Korde

doi:10.1117/12.815564

3 April 2009 Electrostatic control with discrete area variation for beam steering and focusing using membrane mirrors

Miles A. Wickersham, Brian C. Fehrman, Lisa K. Robinson, Andrew W. Downs, Umesh A. Korde

Proceedings Volume 7286, Modeling, Signal Processing, and Control for Smart Structures 2009; 72860F (2009) https://doi.org/10.1117/12.815564
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2009, San Diego, California, United States

Abstract

This paper reports on the development and testing of electrostatically actuated deformable mirrors for optical correction. The system considered here is limited to the lower modes of aberration; namely, focus/defocus and tip/tilt. The main problem with using electrostatics is due to the nonlinear relationship between force and distance in such a system. Accordingly, this work uses a nonlinear control system in order to obtain greater deflection for a given voltage. The paper describes recent experimental results with closed loop control.

Citation Download Citation

Miles A. Wickersham, Brian C. Fehrman, Lisa K. Robinson, Andrew W. Downs, and Umesh A. Korde "Electrostatic control with discrete area variation for beam steering and focusing using membrane mirrors", Proc. SPIE 7286, Modeling, Signal Processing, and Control for Smart Structures 2009, 72860F (3 April 2009); https://doi.org/10.1117/12.815564

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