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3 April 2009 Electrostatic control with discrete area variation for beam steering and focusing using membrane mirrors
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Abstract
This paper reports on the development and testing of electrostatically actuated deformable mirrors for optical correction. The system considered here is limited to the lower modes of aberration; namely, focus/defocus and tip/tilt. The main problem with using electrostatics is due to the nonlinear relationship between force and distance in such a system. Accordingly, this work uses a nonlinear control system in order to obtain greater deflection for a given voltage. The paper describes recent experimental results with closed loop control.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Miles A. Wickersham, Brian C. Fehrman, Lisa K. Robinson, Andrew W. Downs, and Umesh A. Korde "Electrostatic control with discrete area variation for beam steering and focusing using membrane mirrors", Proc. SPIE 7286, Modeling, Signal Processing, and Control for Smart Structures 2009, 72860F (3 April 2009); https://doi.org/10.1117/12.815564
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