Vibration analysis of the zigzag micro-structure for energy harvesting

Mohammad Amin Karami; Daniel J. Inman

doi:10.1117/12.815476

6 April 2009 Vibration analysis of the zigzag micro-structure for energy harvesting

Proceedings Volume 7288, Active and Passive Smart Structures and Integrated Systems 2009; 728809 (2009) https://doi.org/10.1117/12.815476
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2009, San Diego, California, United States

Abstract

An analytical method is developed to calculate the natural frequencies and the corresponding mode shapes of a zigzag structure proposed for MEMS energy harvesting from ambient vibrations. The high natural frequencies of the existing designs of MEMS vibrational energy harvesters are serious drawbacks. A zigzag design is proposed to overcome this deficit. The governing partial differential equations are solved using separation of variables for each of the lateral beams in the structure. The vibration of each beam is related to the vibration of its neighbor beams by continuity and equilibrium conditions. Finally enforcing the boundary conditions results the corresponding eigenvalue problem revealing the natural frequencies and mode shapes. The usefulness of the design is proved by the relation between the natural frequencies and number of elements, providing a method of designing a MEMS harvester with low natural frequency.

Citation Download Citation

Mohammad Amin Karami and Daniel J. Inman "Vibration analysis of the zigzag micro-structure for energy harvesting", Proc. SPIE 7288, Active and Passive Smart Structures and Integrated Systems 2009, 728809 (6 April 2009); https://doi.org/10.1117/12.815476

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