6 April 2009 Vibration control of piezoelectrically actuated microcantilevers
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Abstract
The vibration control of microelectromechanical structures is an interesting and challenging research area that is extensively applicable in micro-mass measurement, micro-sensors and micro-mirror control. An active vibration control technique based on positive position feedback method is constructed in this paper. This method is used to control the vibration of microcantilevers through actuation of a piezoelectric layer that covers one side of the microcantilever. The modified version of positive position feedback used in this paper, employs a second order compensator for vibration suppression, and a first order compensator provides damping. Since the positive position feedback control is based on strain sensing approach, it is extensively applied to piezoelectrically controlled microcantilevers. Similar to conventional positive position feedback, stability conditions are global and independent of the dynamical characteristics of the open-loop system. Root locus diagrams are used to find proper compensator frequency and damping of the closed loop system. A numerical simulation is performed to evaluate the performance of the modified positive position feedback for both steady-state and transient dynamic control. The results indicate that the proposed method is more effective in controlling both steady-state and transient dynamics than conventional positive position feedback.
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S. Nima Mahmoodi, S. Nima Mahmoodi, Mehdi Ahmadian, Mehdi Ahmadian, } "Vibration control of piezoelectrically actuated microcantilevers", Proc. SPIE 7288, Active and Passive Smart Structures and Integrated Systems 2009, 72881F (6 April 2009); doi: 10.1117/12.820071; https://doi.org/10.1117/12.820071
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