31 March 2009 Design and microfabrication of a PVDF acoustic sensor
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This paper presents the design, theoretical analysis, microfabrication and testing of a new type of millimeter-size acoustic sensor using Polyvinylidene Fluoride (PVDF) micropillars and patterned electrodes. The sensor has the potential to achieve 100x the sensitivity of existing commercial sensors in combination with a sound pressure level (SPL) range of 35-180 dB and a frequency bandwidth of at least 100 kHz. A constrained optimization algorithm has been developed as a function of geometric parameters (sensor footprint, diameter and height of the micropillars, gap between pillar edges, and number of pillars) and electrical parameters of the sensor and conditioning amplifier. Details of the fabrication process are described. Nanoindentation tests demonstrate that the PVDF micropillar sensor exhibits piezoelectric responses under an applied voltage or strain, thus demonstrating the sensor concept. Operational amplifier circuit design and experimental setup are also described and developed.
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Jian Xu, Jian Xu, Marcelo J. Dapino, Marcelo J. Dapino, Daniel Gallego Perez, Daniel Gallego Perez, Derek Hansford, Derek Hansford, } "Design and microfabrication of a PVDF acoustic sensor", Proc. SPIE 7290, Industrial and Commercial Applications of Smart Structures Technologies 2009, 72900A (31 March 2009); doi: 10.1117/12.817028; https://doi.org/10.1117/12.817028

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