31 March 2009 High quality factor integrated passive devices for microwave and millimeter wave applications
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Abstract
A fabrication process and multi project wafer run (MPW) service has been developed for realizing integrated passive devices. The fabrication process is simple and low cost ranging applications from consumer electronics to instrumentation and measurement as well as defense and scientific applications. The fabrication process is offered as an MPW service for all types of organizations being suitable for scientific experiments, product prototyping or optimization. The technology has used for realizing microwave and millimeter wave components. Measured result show that the technology as well as accurate design result in loss less than 1.1 dB at 60 GHz for an integrated band-pass filter.
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Tauno Vähä-Heikkilä, "High quality factor integrated passive devices for microwave and millimeter wave applications", Proc. SPIE 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, 72910E (31 March 2009); doi: 10.1117/12.815263; https://doi.org/10.1117/12.815263
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