8 April 2009 A 35 MHz PCMUT phased array for NDE ultrasound
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Abstract
In this paper, the development of a 35 MHz 64-channel Piezoelectric Composite based Micromachined Ultrasound Transducer (PCMUT) phased array for NDE ultrasound application is presented. A 35 MHz PMN-PT single crystal 1-3 composite based PC-MUT phased array was designed with extensive acoustic field and 1D modeling. The initial modeling results demonstrated that the focused detection resolution (10% of -3 dB beam width) could be as small as 30 μm in the azimuth direction. The maximum imaging depth for ceramic samples is around 20 mm. The PC-MUT array being developed will extend the state-of-art NDE phased array technology from approximately 20 MHz to 35 MHz, which will greatly enhance the imaging resolution for a broad range of NDE ultrasound applications.
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Kevin Snook, Kevin Snook, Xiaoning Jiang, Xiaoning Jiang, Changhong Hu, Changhong Hu, Xuecang Geng, Xuecang Geng, Ruibin Liu, Ruibin Liu, John Welter, John Welter, Kirk Shung, Kirk Shung, Wesley S. Hackenberger, Wesley S. Hackenberger, } "A 35 MHz PCMUT phased array for NDE ultrasound", Proc. SPIE 7294, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2009, 729403 (8 April 2009); doi: 10.1117/12.815621; https://doi.org/10.1117/12.815621
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