7 January 2009 Preparation of titanium dioxide films by sol-gel route for gas sensors
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Proceedings Volume 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV; 72970M (2009) https://doi.org/10.1117/12.823632
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 2008, Constanta, Romania
Abstract
Semiconductor oxides such as SnO2, TiO2, WO3, ZnO2 etc. have been shown to be useful as gas sensor materials for monitoring various pollutant gases like H2S, NOx, NH3 etc. In this work, we would like to present the preparation of titanium dioxide films for gas sensor application, via the sol-gel technique. The coating solution was prepared by using titanium isopropoxide precursor, which was hydrolyzed with distilled water under the catalytic effect of different acids (HNO3, HCl or CH3COOH). Titanium dioxide films have been deposited using spin coating method and then synthesized at different temperatures. Fourier transform infrared spectroscopy observation has been used to analyze the sol-gel process. The morphology and the structure of the thin films were analyzed.
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Vasilica Schiopu, Vasilica Schiopu, Alina Matei, Alina Matei, Ileana Cernica, Ileana Cernica, Cecilia Podaru, Cecilia Podaru, } "Preparation of titanium dioxide films by sol-gel route for gas sensors", Proc. SPIE 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 72970M (7 January 2009); doi: 10.1117/12.823632; https://doi.org/10.1117/12.823632
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