7 January 2009 Nano-metrology of macro-systems
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Proceedings Volume 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV; 72971G (2009) https://doi.org/10.1117/12.823663
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 2008, Constanta, Romania
Abstract
In this paper, a small scale laboratory strainmeter for measuring relative strains is presented. The instrument is a high resolution homodyne interferometer with polarizing optics and special designed electronics for analyzing the output signal of the interferometer. Resolution of the order of λ/8 is obtained in the first instance, with the possibility of improvement by electronic means. Measurement range could vary from microns in the case of earth strains to meters in the case of industrial applications.
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F. Garoi, D. Apostol, P. Schiopu, P. C. Logofatu, V. Damian, "Nano-metrology of macro-systems", Proc. SPIE 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 72971G (7 January 2009); doi: 10.1117/12.823663; https://doi.org/10.1117/12.823663
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