6 May 2009 A new chip layout for pyroelectric single-element detectors with high D* and very low microphonics
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Abstract
The paper describes the layout and essential properties of single-element detectors with an innovative layout of the pyroelectric chip. The pyroelectric material used is lithium tantalate. Geometry, arrangement and bonding of the responsive element ensure a very high specific detectivity D* combined with very low microphonics. The properties of both the newly developed sensors and commercially available pyroelectric detectors are compared. Using the results of simulations of the thermal and optical conditions in the environment of the responsive element, the chip layout was optimised to obtain a high signal-to-noise ratio. Furthermore, simulation calculations were performed using the FEM program ANSYS to minimise the signal voltage of the detector in case of mechanical excitation. For this purpose, a three-dimensional model of the assembled and bonded LiTaO3 chip was created. On the basis of the simulated layout, a suitable manufacturing technology was developed and complete detectors were built. It was shown that thanks to these detectors the specific detectivity D* assumed values of (500 K; 10 Hz; 1 Hz; τW = 1, α ≈ 0.9) ≥ 1.8 x 109 cmHz1/2W-1 for a responsive area of [1x1] mm2. The measurement of the acceleration sensitivity produced typical values of RVB < 10 μV/9.81 ms-2 (fB < 1000 Hz).
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Volkmar Norkus, Volkmar Norkus, Gerald Gerlach, Gerald Gerlach, Reinhard Köhler, Reinhard Köhler, "A new chip layout for pyroelectric single-element detectors with high D* and very low microphonics", Proc. SPIE 7298, Infrared Technology and Applications XXXV, 72982D (6 May 2009); doi: 10.1117/12.819449; https://doi.org/10.1117/12.819449
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