27 April 2009 Swept laser interferometric interrogation
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Abstract
A high-speed, swept-laser interferometric interrogation approach is introduced. Dynamic measurements of weak Fabry-Perot or Fizeau type interferometers with gap ranges of 50 um to 1 mm up to 70 Ksamples per second are demonstrated and discussed. Displacement resolution is < 1 pm/rt-Hz. This has application with MEMS and FPPI type sensors.
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Jeff Bush, "Swept laser interferometric interrogation", Proc. SPIE 7316, Fiber Optic Sensors and Applications VI, 73160S (27 April 2009); doi: 10.1117/12.819518; https://doi.org/10.1117/12.819518
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