27 April 2009 Swept laser interferometric interrogation
Author Affiliations +
A high-speed, swept-laser interferometric interrogation approach is introduced. Dynamic measurements of weak Fabry-Perot or Fizeau type interferometers with gap ranges of 50 um to 1 mm up to 70 Ksamples per second are demonstrated and discussed. Displacement resolution is < 1 pm/rt-Hz. This has application with MEMS and FPPI type sensors.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeff Bush, "Swept laser interferometric interrogation", Proc. SPIE 7316, Fiber Optic Sensors and Applications VI, 73160S (27 April 2009); doi: 10.1117/12.819518; https://doi.org/10.1117/12.819518

Back to Top