11 May 2009 Nanotube MEMS: modeling extreme nanoscale devices
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The physics of operation of nanotube NEMS devices is reviewed. Special attention is paid to non-classical effects, rarely described in MEMS analysis, such as van derWaals/Casimir interactions, quantum effects in electrostatics, atomistic parameterization of elasticity. As an example of a breakdown of a classical MEMS theory, the NEMS scaling limitation is derived in a lump model taking into account van der Waals/Casimir attraction.
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Slava V. Rotkin, Slava V. Rotkin, } "Nanotube MEMS: modeling extreme nanoscale devices", Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 731806 (11 May 2009); doi: 10.1117/12.818828; https://doi.org/10.1117/12.818828

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