The physics of operation of nanotube NEMS devices is reviewed. Special attention is paid to non-classical effects,
rarely described in MEMS analysis, such as van derWaals/Casimir interactions, quantum effects in electrostatics,
atomistic parameterization of elasticity. As an example of a breakdown of a classical MEMS theory, the NEMS
scaling limitation is derived in a lump model taking into account van der Waals/Casimir attraction.
Slava V. Rotkin, Slava V. Rotkin,
"Nanotube MEMS: modeling extreme nanoscale devices", Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 731806 (11 May 2009); doi: 10.1117/12.818828; https://doi.org/10.1117/12.818828