5 May 2009 Microscale implementation of a bio-inspired acoustic localization device
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Proceedings Volume 7321, Bio-Inspired/Biomimetic Sensor Technologies and Applications; 73210B (2009); doi: 10.1117/12.821675
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States
Abstract
We present a microscale implementation of an acoustic localization device inspired by the auditory organ of the parasitic fly Ormia Ochracea. The device consists of a pair of circular membranes coupled together with a beam. The coupling serves to amplify the difference in magnitude and phase between the response of the two membranes as the incident angle of the sound changes, allowing directional information to be deduced from the coupled device response. The device was fabricated using MEMS technology and tested with laser Doppler vibrometery. Amplification factors of up to 7 times were observed in the phase difference between the membranes at 90 degree incident sound angles, with directional sensitivity of up to 0.3μs/degree.
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Luke J. Currano, Haijun Liu, Danny Gee, Benjamin Yang, Miao Yu, "Microscale implementation of a bio-inspired acoustic localization device", Proc. SPIE 7321, Bio-Inspired/Biomimetic Sensor Technologies and Applications, 73210B (5 May 2009); doi: 10.1117/12.821675; https://doi.org/10.1117/12.821675
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Semiconducting wafers

Acoustics

Etching

Deep reactive ion etching

Photoresist materials

Silicon

Biomimetics

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