30 April 2009 Fiber optics low-coherence IR interferometry for defense sensors manufacturing
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Abstract
We present novel fiber optics low coherence interferometer apparatus, and novel probe for in-situ characterization of semiconductor structures for IR detector manufacturing. Probe does not exhibit polarization, or strain sensitivity observed in earlier invented systems. In addition it is demonstrated to be able to operate with varying length of optical fibers.
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Wojtek J. Walecki, Fanny Szondy, "Fiber optics low-coherence IR interferometry for defense sensors manufacturing", Proc. SPIE 7322, Photonic Microdevices/Microstructures for Sensing, 73220K (30 April 2009); doi: 10.1117/12.818381; https://doi.org/10.1117/12.818381
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