6 May 2009 Advances in 3D asphere testing and reconstruction
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Abstract
One of the most challenging 3D metrology tasks in terms of required accuracy is the metrology of aspheric surfaces. Due to the required accuracies in the nanometer range, interferometry is one of the preferred methods. The reconstruction of the actual asphere shape from the measured phase data is presented for computer generated hologram approaches as well as for a new, flexible approach that was developed to avoid the use of null test configurations.
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Christof Pruss, Christof Pruss, Eugenio Garbusi, Eugenio Garbusi, Wolfgang Osten, Wolfgang Osten, } "Advances in 3D asphere testing and reconstruction", Proc. SPIE 7329, Three-Dimensional Imaging, Visualization, and Display 2009, 732905 (6 May 2009); doi: 10.1117/12.822678; https://doi.org/10.1117/12.822678
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