Toward extended range sub-micron conoscopic holography profilometers using multiple wavelengths and phase measurement

José M. Enguita; Ignacio Álvarez; Jorge Marina; Guillermo Ojea; José A Cancelas; María Frade

doi:10.1117/12.819456

18 May 2009 Toward extended range sub-micron conoscopic holography profilometers using multiple wavelengths and phase measurement

José M. Enguita, Ignacio Álvarez, Jorge Marina, Guillermo Ojea, José A Cancelas, María Frade

Author Affiliations +

Proceedings Volume 7356, Optical Sensors 2009; 735617 (2009) https://doi.org/10.1117/12.819456
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

Conoscopic Holography proved to be a very adequate solution for in-situ optical measurement in industrial inspection and quality control systems, offering high-precision with a wide range of standoff distances, while being quite insensitive to the harsh environmental conditions often encountered in industry, as it is a common-path technique. With the aim of extending their applicability, we have already addressed, with good results, several issues that improve sensors based on this technology which include: the use of phase information to obtain one-shot profile measurements at frame rate with higher precision; new signal processing techniques; and speckle reduction to diminish measurement errors. However, the undesirable effect of using the phase information is that it reduces the maximum steep that can be measured without ambiguity, which becomes an issue when working with high precisions. In this article we present our ongoing work towards using the concepts of multiple-wavelength interferometry to extend the measurement range, something that, to our knowledge, has not been done for this technology before.

Citation Download Citation

José M. Enguita, Ignacio Álvarez, Jorge Marina, Guillermo Ojea, José A Cancelas, and María Frade "Toward extended range sub-micron conoscopic holography profilometers using multiple wavelengths and phase measurement", Proc. SPIE 7356, Optical Sensors 2009, 735617 (18 May 2009); https://doi.org/10.1117/12.819456

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