Angle alignment method for soft x-ray using double-periodic multilayer

Baozhong Mu; Li Jiang; Shengzhen Yi; Jingtao Zhu; Xin Wang; Qiushi Huang; Moyan Tan; Xiaoqiang Wang; Jing Xu; Youwei Yao; Yi Huang; Hongying Liu; Zhanshan Wang; Lingyan Chen

doi:10.1117/12.820554

30 April 2009 Angle alignment method for soft x-ray using double-periodic multilayer

Baozhong Mu, Li Jiang, Shengzhen Yi, Jingtao Zhu, Xin Wang, Qiushi Huang, Moyan Tan, Xiaoqiang Wang, Jing Xu, Youwei Yao, Yi Huang, Hongying Liu, Zhanshan Wang, Lingyan Chen

Author Affiliations +

Proceedings Volume 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space; 73600M (2009) https://doi.org/10.1117/12.820554
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

A double-periodic multilayer method was proposed to test KBA system of 4.75keV using 8keV source. Alignment of angle is the key for most of grazing incidence systems in x-ray range. But for soft x-ray, strong absorption makes the alignment have to be operated in vacuum, which is difficult enough. A double-periodic multilayer was used to experiment at 8keV in air replacing 4.75keV in vacuum. This multilayer includes two parts, the top and the bottom. The top is W/B₄C multilayer with four bilayers and 6.93nm periods. The bottom is W/B₄C multilayer with 10 bilayers and 3.95nm periods. For 8keV energy, x-ray will penetrate through the top and reflected by the bottom. While for 4.75keV, x-ray will be reflected by the top directly. The full width of half maximum is 0.1° at 8keV and 0.3° at 4.75keV, so it is accurate enough for 4.75keV to experiment at 8keV, which was also verified by the 1-D KBA experiment. This double-periodic multilayer provides a valid solution for alignment in soft x-ray range.

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Baozhong Mu, Li Jiang, Shengzhen Yi, Jingtao Zhu, Xin Wang, Qiushi Huang, Moyan Tan, Xiaoqiang Wang, Jing Xu, Youwei Yao, Yi Huang, Hongying Liu, Zhanshan Wang, and Lingyan Chen "Angle alignment method for soft x-ray using double-periodic multilayer", Proc. SPIE 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, 73600M (30 April 2009); https://doi.org/10.1117/12.820554

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