An auxiliary visible imaging method for alignment of x-ray Kirkpatrick-Baez optics

Baozhong Mu; Shengzhen Yi; Jingtao Zhu; Jing Xu; Xin Wang; Shengling Huang; Moyan Tan; Qiushi Huang; Liang Bai; Xiaoqiang Wang; Yi Huang; Li Jiang; Hongying Liu; Zhanshan Wang; Lingyan Chen; Yongkun Ding; Wenyong Miao; Jianjun Dong

doi:10.1117/12.820558

30 April 2009 An auxiliary visible imaging method for alignment of x-ray Kirkpatrick-Baez optics

Baozhong Mu, Shengzhen Yi, Jingtao Zhu, Jing Xu, Xin Wang, Shengling Huang, Moyan Tan, Qiushi Huang, Liang Bai, Xiaoqiang Wang, Yi Huang, Li Jiang, Hongying Liu, Zhanshan Wang, Lingyan Chen, Yongkun Ding, Wenyong Miao, Jianjun Dong

Author Affiliations +

Proceedings Volume 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space; 73600V (2009) https://doi.org/10.1117/12.820558
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

An auxiliary visible imaging method was introduced to solve the axial and pointing alignment of x-ray Kirkpatrick-Baez optics. Through ZEMAX simulation and x-ray imaging experiments, the axial and pointing alignment accuracy were determined to be ±300μm and ±20μm respectively. The numerical aperture of x-ray Kirkpatrick-Baez optics is rather small, so it's impossible to adjust Kirkpatrick-Baez system by visible imaging directly. An auxiliary visible lens was designed, which was equivalent to x-ray Kirkpatrick-Baez optics on conjugate relationship and accuracy control. The comparative experiments of visible imaging and x-ray imaging indicate that this auxiliary system could meet the alignment accuracy of Kirkpatrick-Baez optics.

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Baozhong Mu, Shengzhen Yi, Jingtao Zhu, Jing Xu, Xin Wang, Shengling Huang, Moyan Tan, Qiushi Huang, Liang Bai, Xiaoqiang Wang, Yi Huang, Li Jiang, Hongying Liu, Zhanshan Wang, Lingyan Chen, Yongkun Ding, Wenyong Miao, and Jianjun Dong "An auxiliary visible imaging method for alignment of x-ray Kirkpatrick-Baez optics", Proc. SPIE 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, 73600V (30 April 2009); https://doi.org/10.1117/12.820558

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