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18 May 2009 Characterization of tin vapor from CO2 laser produced EUV light source
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Abstract
We evaluated basic characteristics of energetic plasma ions and neutrals, and of low-energy fragments (e.g. evaporated material and liquid micro-droplets) from a Tin (Sn) plasma produced by a CO2 (10.6 m) or Nd:YAG (1064 nm) laser. Experiments were performed with free-standing liquid droplet, semi-fixed liquid droplet and fixed solid droplet targets. Characteristics of energetic plasma ions, neutrals and fragments were measured by Faraday Cups, laser-induced fluorescence (LIF) imaging and shadowgraph imaging, respectively. The Sn ions were emitted towards the laser incident direction with a velocity of 10 ~ 100 km/s (kinetic energy of 0.06 ~ 6 keV) and the fragments (the majority of the target material) ejected in the same direction as laser pulse at a velocity of 10 ~ 500m/s. The neutrals were emitted in all directions from the target with a velocity of 5 ~ 40 km/s (kinetic energy of 0.015 ~ 1 keV).
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Yoshifumi Ueno, Tatsuya Yanagida, Takashi Suganuma, Hiroshi Komori, Akira Sumitani, and Akira Endo "Characterization of tin vapor from CO2 laser produced EUV light source", Proc. SPIE 7361, Damage to VUV, EUV, and X-Ray Optics II, 73610X (18 May 2009); https://doi.org/10.1117/12.820966
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