PROCEEDINGS VOLUME 7362
SPIE EUROPE MICROTECHNOLOGIES FOR THE NEW MILLENNIUM | 4-6 MAY 2009
Smart Sensors, Actuators, and MEMS IV
Editor(s): Ulrich Schmid
IN THIS VOLUME

12 Sessions, 55 Papers, 0 Presentations
Biosensors  (3)
Packaging  (3)
Reliability  (3)
Materials  (4)
Proceedings Volume 7362 is from: Logo
SPIE EUROPE MICROTECHNOLOGIES FOR THE NEW MILLENNIUM
4-6 May 2009
Dresden, Germany
Front Matter: Volume 7362
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736201 (17 June 2009); doi: 10.1117/12.834806
Energy Scavengers
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736202 (19 May 2009); doi: 10.1117/12.822829
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736203 (19 May 2009); doi: 10.1117/12.820919
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736204 (19 May 2009); doi: 10.1117/12.821425
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736205 (19 May 2009); doi: 10.1117/12.821606
Biosensors
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736206 (19 May 2009); doi: 10.1117/12.821662
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736207 (19 May 2009); doi: 10.1117/12.822672
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736208 (19 May 2009); doi: 10.1117/12.821653
Resonant MEMS
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620A (19 May 2009); doi: 10.1117/12.821651
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620B (19 May 2009); doi: 10.1117/12.821705
Packaging
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620C (19 May 2009); doi: 10.1117/12.822279
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620D (19 May 2009); doi: 10.1117/12.821186
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620E (19 May 2009); doi: 10.1117/12.821725
Polymer Devices
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620F (19 May 2009); doi: 10.1117/12.820243
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620G (19 May 2009); doi: 10.1117/12.821627
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620H (19 May 2009); doi: 10.1117/12.821712
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620I (19 May 2009); doi: 10.1117/12.821169
Piezoelectric MEMS
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620J (19 May 2009); doi: 10.1117/12.821715
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620K (19 May 2009); doi: 10.1117/12.821636
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620L (19 May 2009); doi: 10.1117/12.821320
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620M (19 May 2009); doi: 10.1117/12.821727
Reliability
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620N (19 May 2009); doi: 10.1117/12.820977
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620O (19 May 2009); doi: 10.1117/12.821643
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620P (19 May 2009); doi: 10.1117/12.821328
Chemical Sensors
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620Q (19 May 2009); doi: 10.1117/12.822150
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620S (19 May 2009); doi: 10.1117/12.821645
Materials
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620U (19 May 2009); doi: 10.1117/12.821661
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620V (19 May 2009); doi: 10.1117/12.822665
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620W (19 May 2009); doi: 10.1117/12.820496
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620X (19 May 2009); doi: 10.1117/12.821485
Optical Systems
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620Y (19 May 2009); doi: 10.1117/12.822058
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736210 (19 May 2009); doi: 10.1117/12.821460
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736211 (19 May 2009); doi: 10.1117/12.821686
Poster Session
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736212 (19 May 2009); doi: 10.1117/12.820335
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736213 (19 May 2009); doi: 10.1117/12.820917
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736214 (19 May 2009); doi: 10.1117/12.821187
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736215 (19 May 2009); doi: 10.1117/12.821304
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736216 (19 May 2009); doi: 10.1117/12.821332
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736217 (19 May 2009); doi: 10.1117/12.821333
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736218 (19 May 2009); doi: 10.1117/12.821335
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736219 (19 May 2009); doi: 10.1117/12.821341
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621A (19 May 2009); doi: 10.1117/12.821443
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621B (19 May 2009); doi: 10.1117/12.821613
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621D (19 May 2009); doi: 10.1117/12.821648
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621E (19 May 2009); doi: 10.1117/12.821655
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621F (19 May 2009); doi: 10.1117/12.821663
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621G (19 May 2009); doi: 10.1117/12.821674
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621H (19 May 2009); doi: 10.1117/12.821699
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621J (19 May 2009); doi: 10.1117/12.821729
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621L (19 May 2009); doi: 10.1117/12.821786
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621M (19 May 2009); doi: 10.1117/12.821797
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621N (19 May 2009); doi: 10.1117/12.821858
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621P (19 May 2009); doi: 10.1117/12.822280
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621Q (19 May 2009); doi: 10.1117/12.822290
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621S (19 May 2009); doi: 10.1117/12.822822
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