Analysis of the quality factor of piezoelectric-actuated micro-resonators

T. Manzaneque; J. Hernando; J. Rodríguez-Aragón; A. Ababneh; H. Seidel; U. Schmid; J. L. Sánchez-Rojas

doi:10.1117/12.821651

18 May 2009 Analysis of the quality factor of piezoelectric-actuated micro-resonators

T. Manzaneque, J. Hernando, J. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid, J. L. Sánchez-Rojas

Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 73620A (2009) https://doi.org/10.1117/12.821651
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

The behaviour of AlN self-actuated beams for potential applications in the field of resonant sensors is analyzed focusing on the characterization of the quality factor. This study is extended to high-order modes up to 7 MHz. Laser Doppler vibrometry and impedance analysis were the measurement techniques used. For the former, the quality factor (Q factor) is deduced from both, the frequency response and the transient response. The impedance measurement is not possible for all the modes due to the symmetry in the modal shape, but when it can be measured, the Q factor may be deduced either from the characteristic frequencies of the resonance or from the equivalent resonant circuit. All the four methods yielded comparable magnitudes for the Q factor in air. In order to validate the quality of the devices, and for comparison purposes, calculations based on finite element method were utilized, and a good agreement was found with measured data, regarding modal shapes and resonance frequencies of each mode.

Citation Download Citation

T. Manzaneque, J. Hernando, J. Rodríguez-Aragón, A. Ababneh, H. Seidel, U. Schmid, and J. L. Sánchez-Rojas "Analysis of the quality factor of piezoelectric-actuated micro-resonators", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620A (18 May 2009); https://doi.org/10.1117/12.821651

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