18 May 2009 What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection
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Abstract
This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common piezoelectric actuated membranes with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator and deflectable membrane, which offers an important simplification in the fabrication process.
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Sandy Zähringer, Sandy Zähringer, Norbert Schwesinger, Norbert Schwesinger, } "What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620L (18 May 2009); doi: 10.1117/12.821320; https://doi.org/10.1117/12.821320
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