Robust superelastic, metallic amplification unit for piezoelectric microactuators

C. Bolzmacher; K. Bauer; U. Schmid; M. Hafez; H. Seidel

doi:10.1117/12.821727

18 May 2009 Robust superelastic, metallic amplification unit for piezoelectric microactuators

C. Bolzmacher, K. Bauer, U. Schmid, M. Hafez, H. Seidel

Proceedings Volume 7362, Smart Sensors, Actuators, and MEMS IV; 73620M (2009) https://doi.org/10.1117/12.821727
Event: SPIE Europe Microtechnologies for the New Millennium, 2009, Dresden, Germany

Abstract

In this work, a robust metallic amplification unit for piezoelectric microactuators is presented. The mechanism which is implemented with a sliced membrane structure made from a superelastic nickel titanium alloy is based on a mechanical lever in order to amplify the small piezoelectrically induced deformation. Therefore, increased stroke can be provided up to high frequencies. The fabrication process using laser ablation, the assembly process, the static and dynamic simulations and experimental measurements are reported. An amplification factor of 9 has been achieved for a specific load transmission point position. The dynamic response shows a quality factor of 25 at 11.97 kHz for the first mode. Compared to silicon, nickel titanium shows enhanced properties against failure and facilitates the integration process.

Citation Download Citation

C. Bolzmacher, K. Bauer, U. Schmid, M. Hafez, and H. Seidel "Robust superelastic, metallic amplification unit for piezoelectric microactuators", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620M (18 May 2009); https://doi.org/10.1117/12.821727

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