18 May 2009 Position encoding and closed loop control of MOEMS translatory actuators
Author Affiliations +
Abstract
We present a new method for detecting the accurate position of micro-electro-opto-mechanical system (MOEMS) devices, thus enabling the implementation of closed-loop controls. The ensuing control mechanism allows building robust MOEMS-based Fourier-transform infrared (FTIR) spectrometers with large mechanical amplitudes and thus good spectral resolutions. The MOEMS mirror device, a rectangular 1.65 mm² metalized plate mirror suspended on bearing springs and driven by comb-structured electrodes, is driven by a rectangular signal with a duty cycle of 50% and high voltage levels up to 140 V at a frequency near twice its mechanical resonance frequency. Out-of-plane mirror displacements of up to ±100 μm have thus been achieved. To handle the high bandwidth of the sinusoidal mirror position reference signal, which is generated by a laser reference interferometer, an analog position detection circuit is necessary. This dedicated circuit demodulates the reference signal and generates a highly accurate control signal returning the zerocrossing position of the mirror. This permits the implementation of a closed-loop control, which ensures optimally stable MOEMS mirror movement and maximal mechanical amplitude, even under varying environmental conditions. While this solution has been developed for a specific MOEMS device, the principle is widely applicable to related components.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Lenzhofer, A. Tortschanoff, A. Frank, T. Sandner, H. Schenk, M. Kraft, A. Kenda, "Position encoding and closed loop control of MOEMS translatory actuators", Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736212 (18 May 2009); doi: 10.1117/12.820335; https://doi.org/10.1117/12.820335
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT

A compact and portable IR analyzer progress of a...
Proceedings of SPIE (May 12 2011)
The status of GEO 600
Proceedings of SPIE (September 29 2004)
Spectroscopy With Triangular Modulation
Proceedings of SPIE (December 01 1989)
Design Principles And Instrumentation For Step-Scan FTIR
Proceedings of SPIE (December 01 1989)
Mach-Zehnder scanning interferometer for energetic photometry
Proceedings of SPIE (December 31 1993)
Laser-interference methods in hydroacoustic systems
Proceedings of SPIE (April 29 2008)

Back to Top