Semiconductor Processing Using Excimer Lasers

Robert J. Pressley

doi:10.1117/12.939679

6 April 1987 Semiconductor Processing Using Excimer Lasers

Robert J. Pressley

Proceedings Volume 0737, New Developments and Applications in Gas Lasers; (1987) https://doi.org/10.1117/12.939679
Event: OE LASE'87 and EO Imaging Symposium, 1987, Los Angeles, CA, United States

Abstract

Lasers have been used to machine semiconductors for many years (Fig. 1). The first practical application was scribing silicon wafers with a Q-switched YAG laser. Many others followed, with the use often determined by the features of the available lasers. This process has been modified slightly in recent years, with lasers being tailored to fill a perceived need.

Citation Download Citation

Robert J. Pressley "Semiconductor Processing Using Excimer Lasers", Proc. SPIE 0737, New Developments and Applications in Gas Lasers, (6 April 1987); https://doi.org/10.1117/12.939679

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