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24 August 2009 Coupling effect in microscale mechanical test
Dongchuan Su, Xide Li, Lijuan Sun
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Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 737535 (2009) https://doi.org/10.1117/12.839244
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China
Abstract
With the trend of miniaturization of the tested objects, the coupling effect in micro/nano mechanical test among the measurement system, the sample and the test environment becomes an important issue. In this paper, a single cantilever typed probe system is proposed and the coupling effect between the loading probe and the tested samples are investigated. The deformations of the loading probe and the cantilever typed samples, Si and silicon nitride cantilevers, are measured with the experiments and their deformation behaviors are discussed.
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Dongchuan Su, Xide Li, and Lijuan Sun "Coupling effect in microscale mechanical test", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 737535 (24 August 2009); https://doi.org/10.1117/12.839244
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KEYWORDS
Sensors
Silicon
Atomic force microscopy
Calibration
Receivers
Computing systems
Environmental sensing
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