25 August 2009 Determination of Young's modulus for microcantilevers in atomic force microscopy
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Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 737538 (2009); doi: 10.1117/12.839247
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China
Abstract
Micro cantilevers in atomic force microscopy are important force sensors in nano research, and the Young's modulus is one of the most important parameters of the cantilevers. Normal testing methods are not suitable for the Young's modulus detecting of micro cantilevers according to the strict scale of the cantilevers, and new methods are needed to the study of micro cantilevers. A new method for determination of Young's modulus of micro cantilevers based on combining the numerical simulation and frequency measurements is presented in this article. The new method involves three steps, the first step is developing the vibration model of the micro cantilever studied immersed in air; the second step is analyzing the vibration behavior of the corresponding cantilevers with the same geometry but different Young's modulus. The third step is measuring the resonate frequencies of the micro cantilevers immersed in viscous fluid such as air, and comparing the experimental results with the numerical results to determine the Young's modulus of the cantilever. Experiments on a commercial rectangular cantilever have been done to validate the method presented in this article.
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Fei Wang, Xuezeng Zhao, "Determination of Young's modulus for microcantilevers in atomic force microscopy", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 737538 (25 August 2009); doi: 10.1117/12.839247; https://doi.org/10.1117/12.839247
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KEYWORDS
Atomic force microscopy

Microfluidics

Silicon

Finite element methods

Sensors

Atomic force microscope

Numerical analysis

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