25 August 2009 Instantaneous surface profile measurement using polarized phase-shifting
Author Affiliations +
Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 73754M (2009) https://doi.org/10.1117/12.839312
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China
Abstract
In this paper, an instantaneous phase-shifting interferometer (IPSI) is constructed, based on polarized light, to capture interference fringe images with different phase shifting instantaneously, and to avoid the effect of surrounding environments. The phase value is calculated according to the intensity of the interferometer images, and the surface profile of specimen can be determined after phase unwrapping. In experiments, the interference images are captured simultaneously by using four CCD cameras and the position mismatch of the four images are corrected by using digital image correlation (DIC). Tests of the measurement system on flat mirror, tilted mirror and wafer are given. An average error between 0.03μ~0.05μm can be achieved, and the maximum error is about 0.1μm.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Terry Yuan-Fang Chen, Terry Yuan-Fang Chen, Yi-Liang Du, Yi-Liang Du, } "Instantaneous surface profile measurement using polarized phase-shifting", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73754M (25 August 2009); doi: 10.1117/12.839312; https://doi.org/10.1117/12.839312
PROCEEDINGS
7 PAGES


SHARE
Back to Top