25 August 2009 Studies on (Sr,Ba)TiO3 epitaxial grown thin films prepared by sol-gel processing
Author Affiliations +
Proceedings Volume 7375, ICEM 2008: International Conference on Experimental Mechanics 2008; 73755K (2009) https://doi.org/10.1117/12.839347
Event: International Conference on Experimental Mechanics 2008 and Seventh Asian Conference on Experimental Mechanics, 2008, Nanjing, China
Abstract
The applications of (Sr,Ba)TiO3 thin films in DRAM(Dynamic Random Access Memory), phase shifters and pyroelectric uncooled infrared detector have been one of the most important fields in the materials science. (Sr,Ba)TiO3 epitaxially grown thin films with good performance were prepared by the Sol-Gel process using barium acetate, strontium acetate and titanium-tetrabutoxide as the precursor materials. SrTiO3 substrate have the same perovskite structure and a similar lattice constant with the BST thin films, and have excellent chemical and thermal stability. The orientations of BST thin film grown on Nb:SrTiO3(100) and SrTiO3(100) substrates were (100) and (200) respectively. The dielectric constant and dielectric loss of the Sr.5Ba0.4Mg0.1TiO3 thin film prepared on Nb:SrTiO3 (100) were 100 and 0.0191 respectively at the frequency of 1M.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xing-hua Fu, Xing-hua Fu, Wen-hong Tao, Wen-hong Tao, Li-qiang Xin, Li-qiang Xin, Feng-jin Sun, Feng-jin Sun, } "Studies on (Sr,Ba)TiO3 epitaxial grown thin films prepared by sol-gel processing", Proc. SPIE 7375, ICEM 2008: International Conference on Experimental Mechanics 2008, 73755K (25 August 2009); doi: 10.1117/12.839347; https://doi.org/10.1117/12.839347
PROCEEDINGS
5 PAGES


SHARE
Back to Top