24 November 2010 Fabrication of polymer waveguide devices for sensor applications
Author Affiliations +
Proceedings Volume 7376, Laser Applications in Life Sciences; 73761A (2010) https://doi.org/10.1117/12.871119
Event: Laser Applications in Life Sciences 2010, 2010, Oulu, Finland
The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mu Cheng, Mu Cheng, Jussi Hiltunen, Jussi Hiltunen, Meng Wang, Meng Wang, Antti Suutala, Antti Suutala, Pentti Karioja, Pentti Karioja, Risto Myllylä, Risto Myllylä, } "Fabrication of polymer waveguide devices for sensor applications", Proc. SPIE 7376, Laser Applications in Life Sciences, 73761A (24 November 2010); doi: 10.1117/12.871119; https://doi.org/10.1117/12.871119

Back to Top