Modelling of planar linear motor for microelectronic equipment

Vladimir V. Jarski

doi:10.1117/12.837088

17 June 2009 Modelling of planar linear motor for microelectronic equipment

Vladimir V. Jarski

Proceedings Volume 7377, Twelfth International Workshop on Nanodesign Technology and Computer Simulations; 73771A (2009) https://doi.org/10.1117/12.837088
Event: Nano-Design, Technology, Computer Simulations, 2008, Minsk, Belarus

Abstract

The subject of this article is the modelling of planar linear motor, using the characteristic calculation module from MATLAB/Simulink and the visualization module developed in Macromedia FLASH MX6. The mathematical model was presented, and the visualization program was described. The simulation results were showed.

Citation Download Citation

Vladimir V. Jarski "Modelling of planar linear motor for microelectronic equipment", Proc. SPIE 7377, Twelfth International Workshop on Nanodesign Technology and Computer Simulations, 73771A (17 June 2009); https://doi.org/10.1117/12.837088

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available