17 June 2009 Modelling of planar linear motor for microelectronic equipment
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The subject of this article is the modelling of planar linear motor, using the characteristic calculation module from MATLAB/Simulink and the visualization module developed in Macromedia FLASH MX6. The mathematical model was presented, and the visualization program was described. The simulation results were showed.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir V. Jarski, Vladimir V. Jarski, } "Modelling of planar linear motor for microelectronic equipment", Proc. SPIE 7377, Twelfth International Workshop on Nanodesign Technology and Computer Simulations, 73771A (17 June 2009); doi: 10.1117/12.837088; https://doi.org/10.1117/12.837088

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