17 June 2009 Modelling of planar linear motor for microelectronic equipment
Author Affiliations +
The subject of this article is the modelling of planar linear motor, using the characteristic calculation module from MATLAB/Simulink and the visualization module developed in Macromedia FLASH MX6. The mathematical model was presented, and the visualization program was described. The simulation results were showed.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir V. Jarski, "Modelling of planar linear motor for microelectronic equipment", Proc. SPIE 7377, Twelfth International Workshop on Nanodesign Technology and Computer Simulations, 73771A (17 June 2009); doi: 10.1117/12.837088; https://doi.org/10.1117/12.837088

Back to Top