Automated nanoscale AFM measurements using a-priori-knowledge

C. Recknagel; H. Rothe

doi:10.1117/12.821621

22 May 2009 Automated nanoscale AFM measurements using a-priori-knowledge

C. Recknagel, H. Rothe

Proceedings Volume 7378, Scanning Microscopy 2009; 73781A (2009) https://doi.org/10.1117/12.821621
Event: SPIE Scanning Microscopy, 2009, Monterey, California, United States

Abstract

The Nanometer-Coordinate-Measuring-Machine(NCMM) has been developed for comparatively fast large area scans with high resolution for measuring critical dimensions. The system combines a metrological atomic force microscope (AFM) with a precise positioning system. The sample is moved under the probe system via the positioning system achieving a scan range of 25 x 25 x 5 mm with a resolution of 0.1 nm. A concept for critical dimension measurement using a-prioriknowledge is implemented. A-priori-knowledge is generated through measurements with a white light interferometer and the use of CAD data. Dimensional markup language (DML) is used as a transfer and target format for a-priori-knowledge and measurement data. Using a-priori-knowledge and template matching algorithms combined with the optical microscope of the NCMM, the region of interest can be identified automatically. In the next step an automatic measurement of the part coordinate system and the measurement elements with the AFM sensor of the NCMM is performed. Automatic measurement involves intelligent measurement strategies, which are adapted to specific geometries of the measurement features to reduce measurement time and uncertainty.

Citation Download Citation

C. Recknagel and H. Rothe "Automated nanoscale AFM measurements using a-priori-knowledge", Proc. SPIE 7378, Scanning Microscopy 2009, 73781A (22 May 2009); https://doi.org/10.1117/12.821621

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