Implications of image plane line-edge roughness requirements on extreme ultraviolet mask specifications

Patrick P. Naulleau; Simi A. George

doi:10.1117/12.824265

11 May 2009 Implications of image plane line-edge roughness requirements on extreme ultraviolet mask specifications

Patrick P. Naulleau, Simi A. George

Proceedings Volume 7379, Photomask and Next-Generation Lithography Mask Technology XVI; 73790O (2009) https://doi.org/10.1117/12.824265
Event: Photomask and NGL Mask Technology XVI, 2009, Yokohama, Japan

Abstract

Achieving line-edge/width roughness (LER/LWR) specifications remains as one of the most significant challenges facing the commercialization of extreme ultraviolet (EUV) lithography. LER is typically viewed as a resist problem; however, recent simulation results have shown that the mask can also be a significant contributor. Problems arise from both mask absorber LER as well as mask multilayer roughness leading to random phase variations in the reflected beam and consequently speckle. Here we describe these effects in detail and explore how they will impact EUV mask requirements for the 22-nm half-pitch node and beyond. Process window analysis yields mask multilayer roughness specifications on the order of 50 pm.

Citation Download Citation

Patrick P. Naulleau and Simi A. George "Implications of image plane line-edge roughness requirements on extreme ultraviolet mask specifications", Proc. SPIE 7379, Photomask and Next-Generation Lithography Mask Technology XVI, 73790O (11 May 2009); https://doi.org/10.1117/12.824265

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