MEMS resonator with digitally tunable resonant frequency

Qingquan Liu

doi:10.1117/12.834703

24 August 2009 MEMS resonator with digitally tunable resonant frequency

Qingquan Liu

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73811W (2009) https://doi.org/10.1117/12.834703
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

This paper proposes, for the first time, a MEMS-based digitally tunable micromechanical resonator (DTMR). A general methodology of tuning the resonant frequency of a MEMS comb-driven resonator using digital voltages is presented. In this mechanism, a microelectromechanical digital-to-analog converter (MEMDAC) is employed as the tuning unit. The resonant frequency of the DTMR shifts in response to the input digital voltage. Several structures have been proposed, while the one using the number of the vertical beams as the scale factor features the optimum linearity. In a modified design, the resonate frequency can be tuned from approximately 65 to 94 kHz. The maximum deviation from ideal linearity can be reduced to 0.31 kHz, which is remarkably less than those of the preliminary designs.

Citation Download Citation

Qingquan Liu "MEMS resonator with digitally tunable resonant frequency", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73811W (24 August 2009); https://doi.org/10.1117/12.834703

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