24 August 2009 MEMS compressed tunable grating
Author Affiliations +
Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73812L (2009); doi: 10.1117/12.835517
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China
Abstract
Currently, MEMS tunable grating draws a lot of attentions due to its promising applications in display, spectrometer, external cavity laser, programmable mask, optical telecommunication, etc. Among phase-tunable and incident-angletunable grating, period-tunable grating distinguishes itself by relative simple structure, ease-to-fabrication, good performance, and ability to be integrated with IC. In this paper, a novel approach based on compressed period grating is demonstrated. Based on a developed comb-drive actuator working in a low voltage of 37V, our grating period was compressed for 12.5%. The first resonant mode of the comb-drive actuator was simulated to be 3.8 kHz by finite element modeling.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiang Liu, Tie Li, Anjie Ming, Yanxiang Liu, Ping Zhou, Yuelin Wang, "MEMS compressed tunable grating", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73812L (24 August 2009); doi: 10.1117/12.835517; https://doi.org/10.1117/12.835517
PROCEEDINGS
6 PAGES


SHARE
KEYWORDS
Microelectromechanical systems

Actuators

Diffraction gratings

Laser optics

Diffraction

Semiconducting wafers

Silicon

Back to Top