Studies of RF magnetron sputtered amorphous HgCdTe films

Jincheng Kong; Shanli Wang; Lingde Kong; Jun Zhao; Yu Ma; Guanghua Wang; Xiongjun Li; Lili Yang; Pengju Zhang; Rongbin Ji

doi:10.1117/12.835539

5 August 2009 Studies of RF magnetron sputtered amorphous HgCdTe films

Jincheng Kong, Shanli Wang, Lingde Kong, Jun Zhao, Yu Ma, Guanghua Wang, Xiongjun Li, Lili Yang, Pengju Zhang, Rongbin Ji

Author Affiliations +

Proceedings Volume 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications; 73833Y (2009) https://doi.org/10.1117/12.835539
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

Amorphous HgCdTe (α-HgCdTe or α-MCT)films on glass substrate were deposited by RF magnetron sputtering technology, amorphous structure of MCT films were studied by XRD and AFM technology, and the "growth window" of α-MCT was obtained. FTIR technology was used to study the optics properties of amorphous MCT films, absorption coefficient of amorphous MCT films (~8×10⁴cm^-1) was obtained and we also observed three absorption regions near the optical gap of amorphous MCT, the optical gap of our a-MCT film is about 0.83eV. The transition of amorphous HgCdTe into crystal HgCdTe happened when the annealing temperature was higher than 130°C.

Citation Download Citation

Jincheng Kong, Shanli Wang, Lingde Kong, Jun Zhao, Yu Ma, Guanghua Wang, Xiongjun Li, Lili Yang, Pengju Zhang, and Rongbin Ji "Studies of RF magnetron sputtered amorphous HgCdTe films", Proc. SPIE 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications, 73833Y (5 August 2009); https://doi.org/10.1117/12.835539

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