4 August 2009 The design and manufacturing of grazing incident KBA x-ray microscope
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In the latest 20 years, for the needed of the inertial confinement fusion(ICF) created by laser, the grazing incident microscopes are more interested., KBA x-ray microscope is preferred among the ICF diagnostic experiment devices. In order to study the ICF experiment (energy range abour the energy 0-3keV), we design and manufacture a set of KBA microscope. The resolution of 5μm can be obtained in the 2 mm field of view. According to the effective blur diameters, we establish the tolerances. We also analyze the reflectivity of two manufacturing methods. Taking the non-coaxial grazing incident KBA microscope designed as an example, x-ray reflecting from metal surface and single film layer are discussed. At a wavelength of 0.83 nm, the influence of the surface root-mean-square roughness (RMS) on reflectivity is analyzed, and x- ray reflectivity of this system is calculated. The results illustrate that reflectivity decreases with RMS increasing. Reflectivity of Cu is 0.021 and that of single film layer is 0.049, thus KBA X-ray microscope is made of single film layer. It met the requirement of the needed.
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Ling-ling Zhao, Ling-ling Zhao, De-lin Sun, De-lin Sun, Hong Ding, Hong Ding, Shuyan Liu, Shuyan Liu, } "The design and manufacturing of grazing incident KBA x-ray microscope", Proc. SPIE 7385, International Symposium on Photoelectronic Detection and Imaging 2009: Terahertz and High Energy Radiation Detection Technologies and Applications, 73850F (4 August 2009); doi: 10.1117/12.830926; https://doi.org/10.1117/12.830926


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