4 August 2009 Temporal phase shifting method using acoustic-optic modulated stroboscopic interferometer (AOMSI) for characterization of microstructures
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Proceedings Volume 7386, Photonics North 2009; 73861I (2009) https://doi.org/10.1117/12.839522
Event: Photonics North 2009, 2009, Quebec, Canada
Abstract
Temporal phase shifting method, which is commonly used for characterization of the microstructures, requiring phaseshifter has inherent errors due to non-linearity. To overcome this, an Acoustic-Optic Modulated Stroboscopic Interferometer (AOMSI) was developed using the principle of Stroboscopic Interferometer. The technique utilizes the advantage of stroboscopy to create phase shifted images without requiring any component for phase shifting. Using Carré algorithm and developed AOMSI the curvature of microstructures due to residual stress was extracted. Experiments were performed on a silicon wafer to demonstrate the feasibility of the presented technique. Further, experiments were performed on a designed micro cantilever to extract surface-height information using the proposed method. To verify the accuracy of the presented method, the same micro cantilever was characterized using a WYKO surface profiler and the comparison was found to be in good agreement.
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Davoud Mohammadalizadeh, Muthukumaran Packirisamy, Narayanswamy Sivakumar, "Temporal phase shifting method using acoustic-optic modulated stroboscopic interferometer (AOMSI) for characterization of microstructures", Proc. SPIE 7386, Photonics North 2009, 73861I (4 August 2009); doi: 10.1117/12.839522; https://doi.org/10.1117/12.839522
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