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31 December 2009 Sensing of waviness of glossy and rough surface by DOE sensor
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Proceedings Volume 7388, Ninth International Conference on Correlation Optics; 73880N (2009) https://doi.org/10.1117/12.848929
Event: Correlation Optics 2009, 2009, Chernivsti, Ukraine
Abstract
Theory to sense waviness of glossy surfaces with different roughness utilizing diffractive optical element (DOE) based sensor is introduced, and experimentally verified. The verifications are performed from commercially available surface roughness standards including reamed, turned, vertically and horizontally milled surfaces with different surface roughness up 6.3μm.
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Raimo Silvennoinen "Sensing of waviness of glossy and rough surface by DOE sensor", Proc. SPIE 7388, Ninth International Conference on Correlation Optics, 73880N (31 December 2009); https://doi.org/10.1117/12.848929
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