31 December 2009 Optoelectronic techniques for constructive characterization of SAW microdevices
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Proceedings Volume 7388, Ninth International Conference on Correlation Optics; 73880R (2009) https://doi.org/10.1117/12.853513
Event: Correlation Optics 2009, 2009, Chernivsti, Ukraine
Abstract
The demand for high-frequency low-loss surface acoustic wave - SAW - filters for telecommunications and remote sensing has led to extensive research focusing on new SAW microdevices. SAW devices have been the subject of increasing interest since 1960 till present and the applicability of optical measurement techniques to detection of SAWs were published in the late 1960s. As a consequence, many types of both constructive and operating characterization methods have been developed. The paper provides a short introduction regarding the developed level of SAW microdevices. Some optoelectronic techniques used for constructive characterization of SAW micro-devices are reviewed. Three optoelectronic measurement techniques are known for detection of surface acoustic waves: diffraction grating technique, the knife-edge technique, and the detection of ultrasonic vibrations using optical interferometry. We describe the results of literature investigation research of optoelectronic techniques for constructive characterization of SAW microdevices. The research work given in this paper concentrates on describing of optoelectronic techniques used for constructive characterization of SAW microdevices. Samples of SAW quartz filters were measured. The input and output inter digital transducers (IDTs) contain 22 paired electrodes which were photolithographed on the quartz substrates (20mm x 18mm x 0.5mm). The space between electrodes of measured channel was 11.25 μm. Finally, we try to draw some conclusions where: optoelectronics tchniques are predicted to be the fundamental measurement methods for measurement of future SAW microdevices.
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Neculai Grosu, Neculai Grosu, Paul Schiopu, Paul Schiopu, Ionica Cristea, Ionica Cristea, Alexandru Craciun, Alexandru Craciun, } "Optoelectronic techniques for constructive characterization of SAW microdevices", Proc. SPIE 7388, Ninth International Conference on Correlation Optics, 73880R (31 December 2009); doi: 10.1117/12.853513; https://doi.org/10.1117/12.853513
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