17 June 2009 Sensor and actuator conditioning for multiscale measurement systems on example of confocal microscopy
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Abstract
Multi-scale measurement systems utilise multiple sensors which differ in resolution and measurement field to pursue an active exploration strategy. The different sensor scales are linked by indicator algorithms for further measurement initiation. A major advantage of this strategy is a reduction of the conflict between resolution, time and field. This reduction is achieved by task specific conditioning of sensors, indicator algorithms and actuators using suitable uncertainty models. This contribution is focused on uncertainty models of sensors and actuators using the example of a prototype multi-scale measurement system. The influence of the sensor parameters, object characteristics and measurement conditions on the measurement reliability is investigated exemplary for the middle-scale sensor, a confocal microscope.
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W. Lyda, W. Lyda, J. Zimmermann, J. Zimmermann, A. Burla, A. Burla, J. Regin, J. Regin, W. Osten, W. Osten, O. Sawodny, O. Sawodny, E. Westkämper, E. Westkämper, } "Sensor and actuator conditioning for multiscale measurement systems on example of confocal microscopy", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738903 (17 June 2009); doi: 10.1117/12.827534; https://doi.org/10.1117/12.827534
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